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    • ITO Thin Films for Low-Resistance Gas Sensors 

      Almaev, Aleksei V.; Kopyev, Viktor V.; Novikov, Vadim A.; Chikiryaka, Andrei V.; Yakovlev, Nikita N.; Usseinov, Abay B.; Karipbayev, Zhakyp T.; Akilbekov, Abdirash T.; Koishybayeva, Zhanymgul K.; Popov, Anatoli I. (MDPI, 2023)
      Indium tin oxide thin films were deposited by magnetron sputtering on ceramic aluminum nitride substrates and were annealed at temperatures of 500 °C and 600 °C. The structural, optical, electrically conductive and ...