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| Study of the Influence of the Irradiation Flux Density on the Formation of a Defect Structure in AlN in the Case of the Effect of Overlapping of the Heavy Ion Motion Trajectories in the Near-Surface Layer | 0 | 0 | 3 | 5 | 0 | 8 | 11 | 2 | 1 | 3 | 12 | 0 | 4 | 2 | 6 | 12 | 0 | 0 | 4 |
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