Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires

Graniel, Octavio; Fedorenko, Viktoriia; Viter, Roman; Iatsunskyi, Igor; Nowaczyk, Grzegorz; Weber, Matthieu; Załęski, Karol; Jurga, Stefan; Smyntyna, Valentyn; Miele, Philippe; Ramanavicius, Arunas; Balme, Sebastien; Bechelany, Mikhael

doi:10.1016/j.mseb.2018.11.007

Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires

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Optical_properties_of_ZnO.pdf (2.21 MB)

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2018-10-01

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eng

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Research Subject Categories::NATURAL SCIENCES, Silicon nanowires (SiNWs), metal-assisted chemical etching (MACE), nanosphere lithography (NSL), atomic layer deposition (ALD), ZnO

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eu-repo/grantAgreement/EC/H2020/778157/EU/Novel 1D photonic metal oxide nanostructures for early stage cancer detection - CanBioSe/CanBioSe/

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https://www.sciencedirect.com/science/article/pii/S0921510718300655
https://dspace.lu.lv/handle/7/50047

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10.1016/j.mseb.2018.11.007

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Konferenču krājumi (CanBioSe) / Conference Abstracts and Proceedings

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Optical properties of ZnO deposited by atomic layer deposition (ALD) on Si nanowires

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