Vakanču klasteru superrežģa veidošanās modelēšana ar kinētisko Monte Karlo metodi
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Latvijas Universitāte
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Abstract
Kalcija fluorīds (CaF2) ir plaši izmantojams gan mikrolitogrāfijā, gan kā loga materiāls UV un dziļā UV (DUV) apgabalos. Tāpēc īpaša uzmanība tiek pievērsta iespējai uzlabot šī materiāla īpašības. Darbā, pirmkārt, tiek kvantitatīvi analizēti eksperimentālie dati par vakanču klasteru superrežģa pašorganizāciju CaF2 materiālā elektronu radiācijas ietekmē. Otrkārt, tiek izvirzīta hipotēze, kas ļautu izskaidrot eksperimentāli novēroto superrežģa veidošanos. Hipotēzes pārbaude tiek veikta, izmantojot detalizētu mikroskopisko modeli un kinētisko Monte Karlo 3D modelēšanu.
Calcium fluoride (CaF2) is widely used both in microlitography and as UV and deep UV (DUV) window material Therefore a particular attention is paid to the possible improvements of material properties. Firstly, we have performed a quantitative analysis of experimental data obtained for void superlattice formation in electron irradiated CaF2. Secondly, a hypothesis is proposed that would allow us to explain experimentally observed void lattice formation. The test is made exploiting a detailed microscopic model and kinetic Monte Carlo simulations.
Calcium fluoride (CaF2) is widely used both in microlitography and as UV and deep UV (DUV) window material Therefore a particular attention is paid to the possible improvements of material properties. Firstly, we have performed a quantitative analysis of experimental data obtained for void superlattice formation in electron irradiated CaF2. Secondly, a hypothesis is proposed that would allow us to explain experimentally observed void lattice formation. The test is made exploiting a detailed microscopic model and kinetic Monte Carlo simulations.