Browsing by Author "Azarov, A."
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Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics
Arslan, H.; Aulika, Ilze; Sarakovskis, Anatolijs; Bikse, Liga; Zubkins, Martins; Azarov, A.; Gabrusenoks, Jevgenijs; Purans, Juris (Elsevier, 2023)An experimental investigation was conducted to explore spectroscopic and structural characterization of semiconducting yttrium oxide thin film deposited at 623 K (±5K) utilizing reactive pulsed direct current magnetron ...