ПросмотрZinātniskie raksti (CFI) / Scientific articles по теме "HiPIMS"
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High power impulse magnetron sputtering of Zn/Al target in an Ar and Ar/O2 atmosphere: The study of sputtering process and AZO films
(Elsevier B.V., 2019)Reactive high power impulse magnetron sputtering (R-HiPIMS) has been demonstrated as a promising technique for the ZnO:Al (AZO) thin film deposition at low temperature with improved electrical properties compared to the ...