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    • Improvement of β-SiC Synthesis Technology on Silicon Substrate 

      Suchikova, Yana; Kovachov, Sergii; Bohdanov, Ihor; Kozlovskiy, Artem L.; Zdorovets, Maxim V.; Popov, Anatoli I. (MDPI, 2023)
      This article presents an enhanced method for synthesizing β-SiC on a silicon substrate, utilizing porous silicon as a buffer layer, followed by thermal carbide formation. This approach ensured strong adhesion of the SiC ...